Abstract
High efficiency piezoelectric micropump driving module with programmable slew-rate and dead-time has been designed, implemented and characterized for driving custom made piezoelectric micropumps. Developed driver enables independent setting of several rectangular output signal parameters, such as frequency, positive and negative amplitudes, slew-rates, dead time, and modes of operation (pump/valve). Implemented driver can achieve amplitudes up to 250 V PP on a frequency range from DC to 1 kHz, slew-rate up to 18V/μs at maximum power consumption 1.6 W (180 mA @ 9 V). In comparison with our previous driver with RC charge/discharge signal shape, presented version increases air flow capability of micropumps from 1.6 sccm to 4.2 sccm. It enables driving of 200 μm thick PZT actuators with 12 nF capacitance.
Highlights
Piezoelectric micropumps are often used in advanced microfluidic applications where accurate pressure, flow control and monitoring are required
We present a novel, cost-effective, version of a miniature high voltage piezoelectric micropump driving module, which generates a true rectangular micropump driving signal with independently settable positive and negative driving signal amplitudes, slew-rate, dead-time and frequency
Actual positive and negative driving signal amplitudes, slew rates and power consumption were measured at each micropump frequency setting
Summary
Piezoelectric micropumps are often used in advanced microfluidic applications where accurate pressure, flow control and monitoring are required. In order to optimize the micropump flow rate and backpressure performance, piezoelectric actuator driving signal has to have appropriate signal shape, amplitude and frequency.
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