Abstract
The authors have begun research into piezoelectric ultrasonic motors using ferroelectric thin films. The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelectric film in which bending is induced in the form of a traveling wave. A small glass lens placed upon the stator becomes the spinning rotor. Piezoelectric micromotors overcome the problems currently associated with electrostatic micromotors such as low torque, friction, and the need for high voltage excitation. More importantly, they may offer a much simpler mechanism for coupling power out. Using thin films of lead zirconate titanate on silicon nitride membranes, various types of actuator structures can be fabricated. By combined new robot control systems with piezoelectric motors and micromechanics, the authors propose creating micromechanical systems that are small, cheap and completely autonomous.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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