Piezoelectric micromachined ultrasonic transducers array based on is mode polarization method

Abstract

Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is a device used in many application such as medical diagnostic, medical acoustic imagine and underwater acoustic applications. Latest research, PMUT is investigated in marine application and underwater acoustic imaging. The important factor in underwater acoustic imaging is the image can capture very clear visibility. The acoustic transducer is very important to make sure that the acoustic signal obtained has good sensitivity and wide operation bandwidth. Conventional underwater acoustic transducer used sandwich method. Then a latest researcher is investigated the microscale transducer called piezoelectric micromachined ultrasonic transducers to increase the performance of acoustic transducers. The conventional PMUT is still has limitation in sensitivity and bandwidth. The investigation of PMUT array based d33 mode polarization will improved the sensitivity of PMUT transducer. The fabrication of PMUT array based d33 mode polarization is simple fabrication. Experimental setup is used pulse-echo method to characterize the sensitivity of acoustic transducer inside water. The open circuit receiving voltage (OCRV) is obtaining the receiving signal from acoustic transmitter. The PMUT array based d33 mode polarization shows it has more sensitive compare the conventional ultrasonic transducer. The design transducer has sensitivity at −56 dB re 1V/μPa at 100kHz and fractional bandwidth at 30%.