Abstract
In this paper, a piezoelectric micro-transformer processed in a SOI (silicon-on-insulator) wafer is presented. The micro-transformer consists of a unimorph circular membrane (PZT/silicon). The manufacturing uses an original method consisting of a deposition by sputtering and a etching by lift-off of thin material layers. This transformer is intended to supply micro-systems requiring a very low amount of energy. An analytical model has enabled us to determine the electrical equivalent circuit of the transformer, to express the resonance frequencies and to plot the deflection and strain shapes of the membrane. A mechanical characterization has been carried out by interferometry and an electric characterization has been conducted using a first prototype.
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