Abstract
AbstractA MEMS‐based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O3 (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to obtain PZT thick film with excellent piezoelectric properties, including a low‐temperature PZT—Si bonding using epoxy resin as the intermediate adhesive layer and thinning of the bulk PZT ceramics by mechanical lapping and polishing method, were carried out. A piezoelectric MEMS power generator array was successfully fabricated and the measurement results for a microgenerator with typical dimension were also presented. The test result shows that this novel technique has great potential to fabricate high‐performance piezoelectric MEMS energy harvester.
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