Piezoelectric linear motor with unimorph structure by co-extrusion process

Abstract

A new piezoelectric linear motor was developed using a ring-shaped, unimorph stator composed of a piezoelectric active layer (0.3PZN–0.7PZT/Mn) and a conductive passive layer (0.3PZN–0.7PZT/Mn/Ag). The stator was prepared by co-extrusion followed by the thermoplastic green machining (TGM) process. After co-extruding the piezoelectrically active and passive layers together, they were machined into a ring shape and then sintered at 930 °C for 4 h. The stator was poled in the thickness direction and operated in radial vibration mode. A glass rod was used as the moving shaft. When a saw-tooth electric field was applied, the shaft moved linearly as a result of the stator's bending motion. When an inverted saw-tooth electric potential was applied, the shaft moved linearly in the opposite direction. The velocity of the piezoelectric linear motor was about 4 mm/s at an applied voltage of 80 V p–p and a resonance frequency of 36.5 kHz.