Abstract
Optical beam deflectors are used to control direction of the optical beam therefore accuracy of the optical system strongly depends on dynamic characteristic of the deflector. Three degrees of freedom (3DOF) piezoelectric micro-actuator for optical beam deflector is investigated in the paper. Piezoelectric micro-actuator consists of piezoelectric cylinder and ferromagnetic hemisphere that contacts the cylinder in the three points. Electrodes of the outer surface of the cylinder are divided into three sections. Three harmonic electric signals are used for piezoelectric cylinder excitation. Numerical and experimental study was performed to analyse dynamic characteristics of the piezoelectric actuator. Results of the studies are compared and discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
