Abstract
This paper reports a novel low-cost fabrication process of a charged cellular microstructured polydimethylsiloxane (PDMS) material referred as piezo-electret or ferro-electret for micro-sensors applications. The dielectric spectra reached on these structures exhibit a high piezoelectric longitudinal coefficient d33 of 350pC/N. A mechanical characterization method proves the reliability of this material for low-frequencies applications around 100Hz.
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