Abstract
Abstract Liquid viscosity is an important quantity for medical analyses (accurate and fast one-time tests) and microfluidic reaction systems (continuous flow sensing). A novel integrated piezoelectric layer with a polymer waveguide on a quartz SH-SAW device has been developed for liquid sensing. The device is capable of sensing viscosities from approximately 1 mPa·s to 10 mPa·s with higher precision than devices without the bilayer. The integrated piezoelectric layer and polymer waveguide enhance the sensitivity of the SH-SAW device. This work expands the potential applications for SH-SAW devices for real-time liquid drop or flow testing. ST-90°X quartz substrate was chosen for the SAW delay-line biosensor because of its stable temperature coefficient of frequency (TCF) at room temperature. Therefore, a zinc oxide (ZnO) piezoelectric thin film layer was used to enhance the local particle displacement and dielectric coupling. We demonstrate the local particle mobility enhancement due to the ZnO layer, and wave mode transition to surface horizontal waves with the bilayer waveguide.
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