Abstract
We proposed a new actuator with an integrated displacement sensor. We examined the bimorph actuator using an oppositely-polarized LiNbO3 plate. The actuator shows a spurious transient response to driving step voltage due to two resonances (fundamental mode: 278 Hz, and secondary mode: 1720 Hz). We obtained an equivalent circuit model using the input impedance characteristics of the driving electrode and the sensor electrode. We could analyze the transient response of the actuator using the equivalent circuit model. Our simulation of the feedback circuit with an equivalent model showed the possibility of suppressing the ringing of the fundamental mechanical resonant mode.
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