Abstract
A rotating specimen holder device for use in the vacuum chamber of a SEM (scanning electron microscope) is developed by using a piezodriven mechanism. The mechanism consists of piezoelectric elements, clamps, and actuators that work as feeders to rotate the spindle. It is specially designed to eliminate the magnetic field influence of standard motors, and the holder can be placed just under the electron probe beam. In this article, the basic ideas, design, and instrumentation techniques are described. Then a servosystem is constructed for positioning the spindle. The angular resolution is 0.9° and the maximum rotation speed is 9.4 s/rotation.
Published Version
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