Piezoceramic Stack Actuators for Micropositioning Stage

Abstract

Based on piezoceramic stack actuators, a stage (dimension of 50mm×50mm×11mm) with a symmetric displacement magnifying mechanism is studied in this paper. FEM simulations are carried out to reveal the performance of the micropositioning stage and the amplification radio of the flexure hinge is 4.76. The working mode of the flexure hinge of the stage is also simulated by finite element method, and its natural frequency is 3291Hz. A series of tests about piezoceramic stack actuators have been done, including static, dynamic and temperature tests. The experimental results are identical to the theoretical analysis and give help to the application of piezoceramic stack actuators. It can also help the precise micropositioning stage driven by PZT to achieve higher positioning accuracy and resolution.