Piezo- and Ferroelectric Properties of Self-Assembled PbTiO3 Nanoisland Structures Fabricated by Metalorganic Chemical Vapor Deposition

Abstract

Self-assembled PbTiO3 nanoisland structures were fabricated on Pt/SiO2/Si at 400°C by metalorganic chemical vapor deposition. The average width and height were 35 and 1.9 nm for PbTiO3 grown for 10 s, and 35 and 3.6 nm for that grown for 20 s, respectively. In-plane X-ray diffraction showed that PbTiO3 nanoisland structures had a tetragonal structure and only c-domains. Piezoresponse force microscopy revealed that the piezoresponse signal decreased with a decrease in the height of nanoisland structures. The minimum height and width of PbTiO3 nanoisland structures showing a piezoelectric hysteresis loop were 1.2 and 27 nm, respectively.