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Abstract
We have used picosecond ultrasonics techniques to study the localized acoustic-phonon surface modes in Mo/Si multilayer reflectors for extreme ultraviolet lithography. Localized surface modes in the first (zone-boundary) and second (zone-center) gaps were simultaneously detected. Oscillation frequency as high as 0.873 THz was observed. An alternating-pump technique has been successfully demonstrated to enhance the signal-to-noise ratio by 10 dB. This technique can be used to improve the sensitivity for probing the surface modes in other multilayer thin-film structures.
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