Picosecond laser-induced evolution of processing properties of 4H–SiC

Abstract

The irradiation threshold of 4H–SiC under picosecond laser action was calculated, and the influence of laser parameters on the size of 4H–SiC was studied. According to the model, the evolution rule of the microgroove size was predicted. The effect of laser parameters on the mechanical properties of 4H–SiC was studied by nanoindentation. The results show that the ablation threshold energy density of the picosecond laser on 4H–SiC is 2.67 J/cm2. The effect regular of laser parameters on the size of 4H–SiC microgrooves: energy density > scanning speed > scanning interval. The error of the microgroove which is between the predicted value and measurements is within 10 %. By doing nanoindentation detection, proving that Pop-in is the elastic-plastic transition point. It shows that laser irradiation has a significant modification effect on the mechanical properties of 4H–SiC. According to the difference range of elastic modulus and hardness, showing that the influence of laser energy density on mechanical properties is dominant. The consequences of the study provide a theoretical foundation for subsequent CMP processing.