Abstract
Glow discharge in oxygen with aluminium cathode has peculiar characteristics. It works at the product (p⋅Lcf) of gas pressure and the cathode space length, smaller than in other cases, e.g. even Ne/Al discharge. Numerical modelling of electrodynamic structure of the cathode region suggests low multiplication of electron fluxes and consequently high electron emission from the “oxidised” cathode surface at relatively low anode-cathode voltages Uac. The above facts explain a low efficiency of the sputtering of “oxidised” Al-cathodes when determined experimentally. Numerical modelling allows the quantitative explanation of the line emission intensity of oxygen molecules such as its “linear “dependence on both gas pressure and discharge current density, Jd. However in the case of line emission of sputtered Al atoms and reflected “free” O atoms we are able only to draw some qualitative conclusions
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