Physics and diagnostics of laser ablation plume propagation for high-T c superconductor film growth

Abstract

The formation, composition and propagation of laser-produced plasmas used for pulsed laser deposition (PLD) of Y 1 Ba 2 Cu 3 O 7− x have been studied under film growth conditions. Four complementary spatially and temporally resolved in situ diagnostic techniques are applied to characterize the expansion of the laser plume into both vacuum and ambient gases: optical emission and absorption spectroscopy, fast ion probe measurements, and fast photography with a gated, image-intensified charge-coupled detector-array (ICCD) camera system. Transient optical absorption spectroscopy reveals large densities of ground state atoms, ions, and molecules in the plume as well as a slower component to the plume transport than is indicated by the plasma fluorescence and ion current. Ablation into background gases results in scattering and attenuation of the laser plume. The exponential attenuation of the positive ion flux transmitted through 50–300 mTorr background oxygen is measured and used to define an overall ion-oxygen reaction cross-section σ i−O 2 = 2.3 × 10 −16 cm 2 under the described film growth conditions. The slowing of the laser plasma and formation of shock structures due to collisions with the ambient gas are described using ion probe measurements and ICCD photographic comparisons of expansion into vacuum and background oxygen. At the pressures used for PLD, distance-time R−t plots derived from the photographs and ion probe waveforms indicate that the higher pressure plume initially expands through the ambient gas in accordance with a drag model (where R = x f [1 − exp( − βt)]), experiencing little slowing until a visible shock structure forms. Following a transition period, in which the plume appears to have two components, a single-component shock structure propagates in better agreement with a shock, or blast wave (R = ξ 0( E/ϱ 0) 1 5 t 2 5 ) model.