Abstract
With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. Physical vapor deposition (PVD) by means of thermal evaporation, magnetron sputtering, ion-beam deposition, pulsed laser deposition, etc., is among the most promising techniques for such purposes. Layer-by-layer deposition of all solid-state thin-film batteries via PVD has led to many publications in the last two decades. In these batteries, active materials are homogeneous and usually binder free, which makes them more promising in terms of energy density than those prepared by the traditional powder slurry technique. This review provides a summary of the preparation of cathode materials by PVD for all solid-state thin-film batteries. Cathodes based on intercalation and conversion reaction, as well as properties of thin-film electrode–electrolyte interface, are discussed.
Highlights
As the world’s population grows and environmental issues become more serious, it is important to find a safer, more reliable, and robust energy supply to replace conventional fossil fuels
While each of the mentioned methods has their advantages and disadvantages, this work will mainly focus on physical vapor deposition of cathode electrodes for all solid-state thinfilm batteries (ASTBs)
The cell showed a capacity of 62 μAh cm−2 μm−1 at 4000 cycles, and shelf lives are estimated for many years by looking at open circuit voltage
Summary
As the world’s population grows and environmental issues become more serious, it is important to find a safer, more reliable, and robust energy supply to replace conventional fossil fuels. Power density is compromised when higher thickness is coupled with slow Li+ kinetics in the electrolyte These drawbacks made researchers look into 3D electrodes and battery architectures for enhancing ASTB performance (i.e., increasing the capacity without sacrificing fast charging) (Oudenhoven et al, 2011; Bünting et al, 2015; Liu et al, 2018; Xue et al, 2019). While each of the mentioned methods has their advantages and disadvantages, this work will mainly focus on physical vapor deposition of cathode electrodes for ASTBs. Physical vapor deposition is a technique where materials are transferred from a condensed phase to a vapor phase and back to a condensed phase as a thin film on a substrate. There are many works that used PLD to fabricate one component of a battery (electrode, electrode coatings, or electrolyte) for application in ASTBs
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