Physical properties of spray pyrolysed pure and doped ZnO thin films

Abstract

ZnO and ZnO:Li films (1-3 mu m thickness) were deposited on a soda lime glass substrate by a spray pyrolysis technique using ZnCl2 and LiCl as starting materials. Physical properties of these films were studied as a function of substrate temperature Ts and lithium concentration. The best ZnO film was obtained for Ts=400 degrees C where it exhibits a conductivity of 6.3*10-3 Omega -1 cm-1 and a mobility 104 cm2 V-1 s-1. X-ray and EDAX studies confirm that it is possible to obtain good transparent conducting ZnO films preferentially oriented along the c axis. When doped with lithium, amorphous films are obtained.