Abstract
Data are presented on the effect of high-frequency three-electrode ion-plasma sputtering and modernized three-electrode ion-plasma sputtering of a Fe–Ag–Pt complex target on the structure and properties of deposited films. The formation of nanocrystalline films with a size of the coherent scattering region of 3.5 nm during high-frequency ion-plasma spraying has been established. With the modernized three-electrode ion-plasma sputtering, a nanocrystalline phase is formed with a coherent scattering region size of 3 nm and higher temperature stability, up to 660 K. There were investigated the thermal stability of the metastable states of the Fe–Ag–Pt films; the electro- and hysteresis magnetic properties of freshly prepared and heat-treated films. The conditions for obtaining films with low values of the temperature coefficient of electrical resistance (∼5 × 10−5 K−1) and coercive force (Hc ∼ 12 kA/m) are determined.
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