Physical properties of cadmium-tin oxide films deposited by d.c. reactive sputtering

Abstract

Transparent conducting films of cadmium-tin oxide were prepared by d.c. reactive sputtering from a CdSn alloy target in an ArO 2 atmosphere. The electrical and optical properties of the films were found to depend on the oxygen concentration in the gas mixture. The lowest resistivity obtained was 4 × 10 −4 Ω cm and the average optical transmission was 90% over the visible region. The structure of the films was examined by X-ray diffraction. The thick films exhibited CdSnO 3 (200) or Cd 2SnO 4 (001) and (130) peaks but most of the thin films were amorphous. The post-deposition annealing of the films in an argon atmosphere affected their electrical and optical properties.