Abstract
The paper considers the construction of a piezoelectric accelerometer capable of measuring constant linear acceleration. A number of designs are proposed that make it possible to achieve high sensitivity with small dimensions and a wide frequency band (from 10−5 Hz). The finite element model of the proposed design was investigated, and its output characteristic and scale factor (36 mV/g) were obtained.
Highlights
Every year, the requirements for various inertial sensors and, in particular, for accelerometers, are becoming increasingly strict and complex
It should be noted that today, with a growing interest in unmanned aerial vehicles and cars, as well as smart devices and instruments, the sensor market is experiencing significant growth, which opens up new market niches
Popular MEMS accelerometers meet this requirement, but for them the lowest detection limit is of the order of 10−4 g [1], which is not enough for navigational systems of tactical accuracy class
Summary
The requirements for various inertial sensors and, in particular, for accelerometers, are becoming increasingly strict and complex. The key indicators were accuracy and sensitivity, but today an increasingly important role is assigned to dimensions, cost, impact resistance, and a number of other parameters. New design concepts of accelerometers were developed, such as MEMS accelerometers, for example. Popular MEMS accelerometers meet this requirement, but for them the lowest detection limit is of the order of 10−4 g [1], which is not enough for navigational systems of tactical accuracy class. There are piezoelectric accelerometers that have a low detection limit (10−5 –10−6 g) and shock resistance, but are limited from below by a frequency range of the order of 0.1 Hz [2]. We propose a new design concept of the piezoelectric accelerometer to combine the advantages of the two abovementioned types of transducers
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