Physical mechanism of beam splitting based on reflective embedded double-layer grating

Abstract

It is not easy to achieve high performance for conventional beam splitters, such as high efficiency, good uniformity, polarization-independence, and wide bandwidth. A reflective embedded double-layer grating is described for beam splitting. With optimized grating profiles, the novel beam splitter can diffract both TE and TM polarizations into two orders with high performance. For the easy production, the fabrication tolerance is investigated and given. Most importantly, efficiencies more than 45% can be split into two orders within the wide bandwidth of 1412–1647 nm for TE polarization. The beam splitter based on multilayer coatings is sensitive to the incident angle and wavelength. And the bandwidth needs to be improved for the beam splitter based on simple grating. The design is of benefit for the performance improvement of the beam splitter by new grating configuration compared with the conventional simple grating.