Physical field distribution of RF thermal plasma based on three-dimensional numerical simulation

Abstract

The generation of radio frequency thermal plasma contains rich and complex physical field distribution. Correct understanding of these physical field distribution has a guiding role in the application of radio frequency thermal plasma in the industrial field. Radio frequency (RF) thermal plasma technology can be widely used in the industrial field. To obtain more accurate information of the plasma physical field, a three-dimensional numerical simulation was used to study the distribution of the RF thermal plasma physical field. The mathematical model of plasma was established based on three-dimensional numerical simulation. The electromagnetic field equation was set. The relationship between electric field and magnetic induction was obtained. The thermodynamic equation of the plasma physical field was obtained, and the inlet and outlet boundary conditions were set. A plasma physical field distribution simulation algorithm is designed to obtain a physical field simulation distribution result. In the simulation analysis, the voltage, current and electron temperature are simulated and analyzed respectively. The experimental results verify that when the pressure increases, the current and voltage show a certain downward trend, and when the discharge power increases, the current and voltage show a synchronous increasing trend. The electron temperatures at 100 Pa and 205 Pa are between 1.07-1.10 and 1.04-1.07, respectively. The difference between the simulated electron density and the actual electron density is less than 1 × 1019, which indicates that the method has high accuracy. The physical field distribution simulation method provides technical support for the practical application of the plasma in the radio frequency heat, and has great application value. Besides, The research results have important guiding significance for optimizing and controlling the practical application process of RF thermal plasma.