Abstract
Photovoltaic characteristics of passivated emitter and rear contact (PERC) silicon solar cells with chemical and molybdenum oxides stacked thin films were investigated. Chemical oxides were formed by various nitric acid solutions. Molybdenum oxides were performed by thermal evaporation from granules of MoO 2 (99.9% purity). The parameters, including the concentration and treated time of nitric acid, were investigated.. Compared with the PERC without chemical oxide, the achievement of a conversion efficiency (CE) improvement of more than 0.6% absolute from 18% to 18.6% in PERCs with chemical oxide formed at 25% for 30 s was explored. The promoted mechanism could be attributed to the large negative Q ot in SiO x/ MoO x bulk stacked films and low D it in MoO x /SiO x /Si(100) interface.
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