Abstract
Permanent refractive index changes caused by a KrF excimer laser operating at 248 nm in GeO 2–SiO 2 glasses deposited on Si (100) substrates using flame hydrolysis deposition (FHD) are presented. The sample was amorphouslike investigated by X-ray diffraction (XRD), and the ratio of Ge:Si is 14:86 from X-ray photoelectron spectroscopy (XPS) analysis. The 10-min irradiation with a KrF excimer laser (10 Hz, 187 mJ/cm 2) induced a positive refractive index change of 0.341% at 1550 nm, which has achieved an international level of this field. An innovative photomask with a Cr-loaded structure coated on a UV quartz glass, was used to fabricate a 50 μm gap with a period of 100 μm waveguide grating under 1460 mJ/cm 2/pulse at 6 Hz, and the diffraction patterns were observed clearly. The extinction coefficients of the samples are also measured over the range 250–1600 nm.
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