Photosensitive poly(vinylene carbonate)s based on reaction development patterning with dilute aqueous alkaline solution

Abstract

We examined positive-tone pattern formation based on reaction development patterning (RDP) using hydrolysis of carbonate groups on the side chains of vinyl polymers. Homopolymers and copolymers with carbonate groups were prepared by radical polymerization using vinylene carbonate (VCA) as a monomer. Application of RDP to the VCA homopolymer resulted in unclear positive-tone pattern because the high reactivity of the carbonate group led to insufficient difference in solubility between the exposed and unexposed areas. When we applied RDP using 5.0 wt% NaOHaq as developer to the copolymers between VCA and vinyl acetate (P(VCA–VAc)s), clear positive-tone patterns were successfully obtained. The effect of the ratio of carbonate groups in the copolymers on the development property of the RDP process was examined, and the use of a copolymer in which the ratio between VCA and VAc was 1:0.6 was found to yield positive-tone pattern with the highest contrast. Pattern formation using more dilute developer (1.0 wt% NaOHaq) was also achieved. Though conventional photosensitive polymers are required to have acidic or protected acidic groups for alkaline development, we succeeded in addition of photosensitivity to P(VCA–VAc)s, which do not have such functional groups, by using dilute aqueous alkaline solutions as developers. © 2015 Society of Chemical Industry