Photoresist waste treatment : U.S. Patent 5,422,032. June 6, 1995 J.A. Brown, Assignor to viktron Ltd. Partnership, Carol Stream, Ill.

Abstract

The new research reactor FRM-II in Garching will be equipped with thermal, cold and (optional) very cold neutron guides. The main system in a specially designed beam tube (SR-1) looks onto the cold source and consists of six primary guides of cross-section 120×60 mm2 (2 guides), 170×60 mm2 (2) and 170×50 mm2, respectively. These guides enter a neutron guide hall of 53×26 m2 experimental area, some of the guides can be lengthened into the old reactor hall of the old “Atom-Ei”. The guides will be coated with either Ni-58 or super-mirror (mostly m=2, 3.5 in focussing sections near the instruments). For optimum background conditions the guides are designed for a short length of direct sight by coating at least the garland side with super-mirror and/or subdividing the width by thin mirror plates into narrower channels. In order to obtain many “endposition” places the primary beams are subdivided in height or width and individual beams are obtained by beam benders. One of the guides, which provides a high-resolution TOF-spectrometer, is double-bent S-shaped in order to get a sharp cut-off at short wavelength. A second pair of cold neutron guides will be installed in beam tube SR-4. A pair of thermal guides for two diffractometers in the experimental hall of the reactor will be installed at beam tube SR-8. Similar to the TGV at ILL a vertical guide can be installed in the vertical cold source to guide very cold neutrons into the reactor hall in first floor.