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Abstract
We fabricate L3 cavities in a silicon nitride photonic crystal, with cavity modes in the visible range. We demonstrate a noninvasive method to characterize the cavities: the sample is illuminated on its edge and the upward-scattering spectrum is measured. We determine the modes' wavelengths, polarizations, and quality factors. We find modes between 700 and 830 nm with quality factors up to 280, polarized along or perpendicular to the cavity. The tuning of the cavity characteristics by means of its geometric parameters (holes sizes and shift) is discussed. The results are analyzed and compared with numerical simulations.
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