Abstract

Integrated silicon photonics has played an important role in advancing the applications of quantum information and quantum science. However, it is challenging to integrate all components with state-of-the-art performance using only a homogeneous platform. Here, by combining high nonlinearity and low losses in a heterogeneous silicon platform, we efficiently generate high-quality photon pairs through spontaneous four-wave mixing in a hydrogenated amorphous silicon waveguide and route them off-chip through a low-loss silicon nitride waveguide. A record high coincidence-to-accidental ratio value of 1632.6 (±260.4) is achieved in this heterogeneous design with a photon pair generation rate of 1.94 MHz. We also showcase a wide range of multichannel photon sources with a coincidence-to-accidental ratio consistently around 200. Lastly, we measure heralded single-photons with the lowest gH(2)(0) of 0.1085 ± 0.0014. Our results demonstrate the heterogeneous silicon platform as an ideal platform for the efficient generation of photon pairs and off-chip routing with low losses. It also paves the way for a future hybrid photonic integrated circuit by collecting distinct features from different materials.

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