Abstract
Recently, a number of studies have focused on micro-manufacturing processes, which find use in a variety of applications, including the production of microelectromechanical systems (MEMS). The process of ablation in materials is mainly governed by the laser source and scanning speed. The rate of material ablation is influenced by chemical and physical properties. In this work, the energy from a CO2 laser was used to ablate three different materials, namely, stainless steel 304L, a thin film of amorphous aluminum oxide (Al2O3), and pure silicon, due to their wide use in MEMS technology. The laser parameters used were an average power of 18 W and a spot size of 200 μm. The maximum depth during the photomechanical ablation process was 72 μm in the case of 304L steel and 77 μm in the case of the Al2O3 thin film for a scan rate of 24 mm/min. However, at the same scan rate, silicon did not exhibit any penetration. As expected, while increasing scanning speed the ablation depth decreases due to reduced interaction time between laser and material. The theoretical ytterbium fiber laser shown in this study can thus be employed in the manufacturing of a wide variety of materials used in the production of MEMS as well as those used in clean energy technologies.
Highlights
IntroductionThe interaction of lasers with materials can result in a wide range of effects that depend
The theoretical ytterbium fiber laser shown in this study can be employed in the manufacturing of a wide variety of materials used in the production of microelectromechanical systems (MEMS) as well as those used in clean energy technologies
Studies have focused on direct ablation processes and have found that they can be used in a variety of devices such as biomedical devices and micro-electromechanical systems (MEMS) and for developing new materials that can be used as semiconductors and in the generation of clean energy [2]-[4]
Summary
The interaction of lasers with materials can result in a wide range of effects that depend. There is relatively little knowledge about the effect of the specific mechanical properties of materials and interaction on laser milling tests. The passive film formed on austenitic stainless steel has been described as consisting of distinct bilayers. Recent studies have observed that the passive oxide film formed on stainless steel consists primarily of chromium oxide (Cr2O3) and iron oxide (Fe2O3) as the inner and outer layers, respectively. Such bilayers and passive films exhibit semiconducting behavior and have attracted attention for use as photo-anodes in photo-electrochemical cells [8] [9]. The characteristics of laser milling with respect to material ablation were assessed
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