Abstract
Photoluminescence spectra of polar ZnO/c-Al2O3 and non-polar ZnO/r-Al2O3 films grown by the atmospheric-pressure CVD using Zn and H2O as source materials have been investigated. For the non-polar films, the I0, I1 and I2 lines on the high energy side of exciton-region were relatively strong. For the polar films, however, these emission lines were very weak. Moreover, several non-polar films exhibited the C-exciton emission. These differences between the polar and non-polar films are probably due to the difference in polarization selectivity resulting from the difference in growth direction. For both the polar and non-polar films, the I4 line attributed to the exciton bound to the H related donor increased with source supply ratio of H2O to Zn. For the non-polar films, the I6, I8 and I9 lines attributed to the group III elements became weaker with increasing Zn source temperature suggesting the possibility of impurity doping under stoichiometry control.
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