Abstract
Photoluminescence (PL) spectroscopy has been used to study the incorporation of C in several samples consisting of strained Si 1 − x − y Ge x C y epilayers lattice matched to Si (001). To obtain the total C concentration, these samples were characterized by both SIMS and Auger emission spectroscopy, and X-ray diffraction data was analyzed to obtain the substitutional C concentration. The difference of the total and substitutional C concentrations, i.e., the non-substitutional carbon fraction, was found to be directly correlated with specific spectral lines in both the room-temperature Raman and low-temperature PL spectra.
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