Photoluminescence of Polymer Film Fabricated by Plasma-Enhanced Chemical Vapor Deposition from Mixture of Benzene and Cyclohexene

Abstract

In order to control the molecular structure of a polymer film deposited by plasma-enhanced chemical vapor deposition (PECVD) for fabricating an optical functional device, we attempt to copolymerize a polymer film from two types of monomer. One type of monomer functions as an optical functional segment without structural degradation and the other functions as a binding material by decomposing itself. In the present study, we examine the electron state and interaction between electrons and molecular vibration by analyzing photoluminescence spectra excited by an argon ion laser (2.410 eV). As a result, firstly, we found that photoluminescence arises from monosubstituted benzene introduced into the alkyl network. Secondly, the Huang–Rhys dimensionless coupling parameter S is in the range from 1.2 to 1.4, which is comparable to that of poly(phenylene vinylene) (PPV). The interacted molecular vibration is in the lower-order mode of framework vibration of the phenyl ring. In addition, we try to introduce fluorine decomposed from CF4 to the film. The fluorine causes the formation of a defect in the neighborhood of the phenyl derivative. That is, the fluorine creates the defect inside the phenyl derivative.