Abstract

Time-resolved studies of photoluminescence in the energy range 1.4–3.2 eV are carried out for GeOx films (x ≤ 2) containing Ge nanoclusters. The relaxation times vary in the range from 50 ns to 20 μs. The films are produced by single-stage pulsed laser ablation and deposited from the direct and reverse fluxes of particles of the erosion spray in oxygen and argon atmosphere. The dependences of the photoluminescence properties of the films on the conditions of deposition and on doping with gold are studied. The photoluminescence bands, with peaks at the energies 1.42–2.1 eV, are narrow, slow, and close to each other in energy, whereas the other bands, with peaks near 2.5 eV and in the range 2.7–2.9 eV, are broad, faster, and only slightly overlapping in energy. The results are interpreted in the context of the model of photoluminescence in Ge quantum dots, whose dimensions are controlled by the conditions of their formation.

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