Abstract
In this work a laser-produced plasma (LPP) source was used to create low temperature plasmas. An extreme ultraviolet and soft X-ray (EUV/SXR) radiation pulse was used for ionization of molecular gases, injected into a vacuum chamber synchronously with the EUV/SXR pulse. Energies of photons exceeding 100 eV were sufficient for dissociative ionization, ionization of atoms or even ions. The resulting photoelectrons had also enough energy for further ionizations or excitations. Time resolved UV/VIS spectra, corresponding to single charged ions, molecules and molecular ions, were recorded. For spectral lines, corresponding to radiative transitions in F II and S II ions, electron temperature was calculated based on a Boltzmann plot method. Numerical simulations of the molecular spectra were fitted to the experimental spectra allowing for determination of vibrational and rotational temperatures.
Highlights
Low temperature plasmas are widely used in different technologies [1]
Irradiation of molecular gases, injected into the interaction region, by extreme ultraviolet and soft X-ray (EUV/soft X-ray (SXR)) photons resulted in numerous processes including dissociative ionization or creation of molecular ions
The most intense spectrum, recorded at a time delay tt = 150 nnnn after the gas irradiation by the extreme ultraviolet (EUV)/SXR pulse, contains series of lines corresponding to vibrational emission bands of NN* and NN*+ species
Summary
Low temperature plasmas are widely used in different technologies [1]. Probably the most important is application of plasma processes in the microelectronics industry. This type of deposition allows for production of layers having unique properties like hydrogenated silicon layers or diamond-like carbon Another important process is plasma etching [5,6]. The method was used for a large variety of analytical tasks such as the determination of noble metals [20], the determination of the rare earth elements [21] or the determination of Hg with the aid of continuous cold vapour generation [22] In this case the sample aerosol was introduced into the low temperature plasma and the emission spectra of the excited species were measured and analysed. Comparing to plasmas produced using standard generators, even exceeding 1018cm-3 [24], was demonstrated All these works concerned spectral investigations of atomic or ionic species. Based on ionic and molecular spectra, the electron, vibrational and rotational temperatures were estimated
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