Abstract
The performance of surface texture instruments needs to be assessed periodically. Although a step height standard checks vertical magnification and an R a standard checks mathematical integration, no stylus wear standard was available for checking resolution. Such a standard has now been produced with vertical-walled slots of widths 2.5, 5, 10 and 20μm, and a minimum depth of 42.4μm, made by anisotropic photoetching of polished silicon slices. During exposure of photoresist the slots were aligned with a crystal cleavage plane to control line width and this was achieved using a circular table to orientate the slice with a chrome-on-glass mask. These stylus wear standards are now commercially available
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