Abstract
The difference in the structure of oxide/SiC interface between dry and pyrogenic oxidation and the effect of post-oxidation annealing in Ar atmosphere on the interfaces have been studied by X-ray and ultraviolet photoelectron spectroscopy to make clear the interface structures which spoil the electrical properties. It is found that intermediate layers containing Si 1+ oxidation states exist in both cases of oxidation method and the thickness of the layer changes by Ar annealing. It is also found that the oxide/SiC band offsets and the structures of O2p peak, observed in valence band spectra, change remarkably by Ar POA in both cases of oxidation method. The bond states at SiC/oxide interfaces have been discussed by considering these results together with the results from C-V measurements.
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