Abstract
In this paper we propose a mathematical model for calculating the XPS intensity distribution from textured sample surfaces covered with a thin film. The surface roughness is approximated using triangular prisms. Analytical expressions for calculation of the angular photoelectron intensity distribution are given. The obtained results allow an understanding of the relation between the escape depths of emitted photoelectrons and the angular XPS intensity distribution. The results show that the X-ray photoelectron signals vary significantly with a change in surface overlayer thickness and prism slope angle α. The maximum of the XPS intensity distribution does not correspond to the maximum escape depth of emitted photoelectrons. The ejected photoelectron ejection angle characterizes the maximum location depth of the investigated component or chemical bond. This model is useful when evaluating the surface roughness and the film thickness.
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