Abstract
In this study, we implemented the backside PLS (Photoelectric Laser Stimulation) based circuit edit on an analog circuit block of a mixed-signal IC (Integrated Circuit). In this technique, a laser with the wavelength in the NIR (Near Infrared) range is employed to optically stimulate the DUT (Device under Test) at the transistor level, and impact optically its electrical performance including threshold voltage. Accordingly, we could evaluate the circuit design, identify its weakness and verify the corrective action in a time and cost efficient manner. As a result, the costly and time-consuming backside/frontside FIB (Focused Ion Beam) circuit edit could successfully be replaced with the fast, simple and non-destructive PLS based approach.
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