Abstract
Realizing high-sensitivity, high-precision, non-contact strain perception units, and making it flexible to integrate with existing systems is an important research topic in the field of sensing technology. In this paper, we constructed one type of dual-mode strain sensing device, combining the non-contact and easy integration characteristics of optical and electrical signals. On one hand, the resonant wavelength of lasing mode can be tuned using strain-induced changes in the refractive index of ZnO microresonator with a detection sensitivity of 17.25 meV/% based on optical signal; on the other hand, the Schottky contact barrier also can be modulated using the piezotronics effect to control the output current with a detection sensitivity of 22.41 μA/% through electrical signals. These dual-mode strain-sensing mechanisms indicates that the device integrates the advantages of both optical and electrical signals, which is expected to expand its scope of application in complex environments, such as intelligence systems, in-vivo and underwater.
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