Photodetectors on the basis of Ge/Si(001) heterostructures grown by the hot-wire CVD technique

Abstract

The fabrication of photodetectors for the wavelength range of communications λ = 1.3–1.55 µm on the basis of Ge/Si(001) heterostructures with thick (~0.5 µm) Ge layers grown by the hot-wire technique at reduced growth temperatures (350°C) is reported. The single-crystal Ga layers are distinguished by a low density of threading dislocations (~105 cm–2). The photodetectors exhibit a rather high quantum efficiency (~0.05 at λ = 1.5 µm and 300 K) at moderate reverse saturation current densities (~10–2 A cm–2). Thus, it is shown that the hot-wire technique offers promise for the formation of integrated photodetectors for the wavelength range of communications, especially in the case of limitations on the conditions of heat treatments.