Abstract
Phenyl isopropenyl ketone was terpolymerized with styrene and n-butyl acrylate. Clear 400 nm thick layers of the terpolymer on glass plates were found to be removed by brushing-off after deep ultraviolet (DUV) exposure for 3-5 min at room temperature or for 1 min at 80-115°C. 1.6 μm thick polymer layers were removed by 3 times of repeated cycles of 3 min DUV-exposure at 100-150°C and brushing-off. The polymer layer irradiated under some conditions could not be detached from the substrate, and crosslinking in parallel with degradation was found to take place during DUV irradiation.
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