Photocurrent spectroscopy of low-k dielectric materials: Barrier heights and trap densities

Abstract

Measurements of photoinduced current have been performed on thin films of porous low-k dielectric materials comprised of carbon-doped oxides. The dielectric films were deposited on silicon surfaces and prepared with a thin gold counterelectrode. From the spectral dependence of the photoinduced current, barrier heights for the dielectric∕silicon and dielectric∕gold interface were deduced. Transient currents were also found to flow after the photoexcitation was abruptly stopped. An estimate of the density of shallow electron traps within the low-k material was obtained from the measurement of the net charge transported from this detrapping current. A density of traps in the range of 6×1016traps∕cm3 was inferred for the low-k films, far exceeding that observed by the same technique for reference dielectric films of pure SiO2. This behavior was also compatible with photocurrent I-V measurements on the low-k dielectric films and SiO2 reference sample.