Abstract
The photoconductive characteristics of amorphous titanium oxide films (a-TiOx:OH) prepared by remote plasma-enhanced (RPE) chemical vapor deposition, in inert Ar atmosphere with/without a small amount of oxygen, have been studied. In inert Ar atmosphere without oxygen, the residual decay of photocurrent (long decay time) is observed after removing UV irradiation. On the other hand, in inert Ar atmosphere with a small amount of oxygen, the photocurrent under UV irradiation is influenced strongly by an environmental gas with oxygen gas. The maximum of photocurrent (photosensitivity) is nearly inversely proportional to oxygen partial pressure, suggesting that the present films are useful for sensors of environmental oxygen gases. The decay of photocurrent, after removing UV irradiation, follows a stretched exponential function. The effective decay time τ is nearly inversely proportional to oxygen partial pressure. The results will be discussed in terms of the surface reaction of oxygen gas on the present films.
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