Abstract
Ultrafine ZnO particle layers were prepared by gas evaporation of Zn in atmospheres of Ar + O 2, and their photoconductivity and gas sensitivity of conductivity were studied. The pressure of Ar + O 2 was changed from 10 to 100 torr in order to vary the ZnO particle size (18–250 nm). All the ultrafine ZnO particle layers showed photoconductivity associated with uv light irradiation. The photoconductivity decreased with a decrease in the mean particle size. The conductivity of the ultrafine ZnO particle layers decreased remarkably associated with adsorption of NO 2. It could be confirmed that the gas sensitivity of the ultrafine ZnO particle layers increased with a decrease in the particle size.
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