Abstract

Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical parameters on final micro-elements dimensions is studied for two types of single mode 760 nm VCSELs. The difference of the resulting tip shape between the two lasers is due to the strong differences of their emissions, as they are nicely reproduced by the computed near-field profiles. The tip shapes are also compared to those produced by the light emitted by an optical fiber and differences with VCSEL tips are discussed. Also the VCSEL characteristics with fabricated tips are discussed and found in good agreement with optical modeling.

Highlights

  • Introducing disorder in a periodic structure such as a thick grating or a photonic crystal can lead to specific behaviors, such as strong absorption [1,2,3], enhanced transmission [4,5,6], or controllable transport properties including localization [7,8,9,10,11]

  • We investigate the specular reflectance of a partially ordered nanoporous alumina film on an aluminum substrate by using the method of Rigorous Coupled Wave Analysis (RCWA [24,25,26])

  • We focus on the reflectance spectrum in the specular direction, i.e. the specular value of the normalized bidirectional reflectance distribution function (BRDF)

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Summary

Introduction

Introducing disorder in a periodic structure such as a thick grating or a photonic crystal can lead to specific behaviors, such as strong absorption [1,2,3], enhanced transmission [4,5,6], or controllable transport properties including localization [7,8,9,10,11]. The pore distribution over the surface exhibits a short-distance order close to an hexagonal arrangement, long-distance order cannot be defined Visual observation of such nanoporous layers shows bright specular reflected colors in the visible spectrum due to optical interference [17]. Rigorous two-dimensional (2D) finite-difference time-domain calculations have been performed to simulate partially ordered nanoporous alumina films illuminated in guided light conditions, i.e. parallel to the layer. These simulations showed photonic stop bands of transmittance [23], but no results have been presented when the sample is illuminated under some arbitrary incidence. The longer term goal is to simulate the general trend of the optical response based on morphological parameters and so be able to produce samples with specific optical effects

Sample elaboration
Morphological characterization
Experimental specular reflectance spectrum
Modeling method
Dispersion in the nanopore central location
Conclusions

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