Photocatalytic properties of Au/TiO 2 thin films prepared by RF magnetron co-sputtering

Abstract

Au/TiO 2 thin films with various Au doping contents were deposited on quartz substrates by radio frequency (RF) magnetron co-sputtering. The as-deposited Au/TiO 2 films were characterized by energy-dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), XRD, and UV–vis techniques. Au doping and UV treatment enhanced the photocatalytic efficiency of TiO 2 thin films. The optimal RF power of the Au target and UV treatment time were 5 W and 1 h, respectively. The enhanced photoactivity of Au(5 W)/TiO 2 thin films with UV treatment is found to result from the increased hydroxyl concentration.