Abstract

Nanocomposite TiO 2 -ZnO thin films, with different ZnO content, were deposited by electron-beam evaporation on glass and Si(1 0 0) substrates. The resulting films were annealed in air for 1 h at 450 °C. X-ray diffraction revealed the presence of monoclinic β -TiO 2 and hexagonal ZnO for the films prepared with ZnO content of 0 at.% and 100 at.%, respectively. Mixed monoclinic β -TiO 2 and hexagonal ZnO phases were observed at higher ZnO content between 50 at.% and 85 at.%. Spectroscopic ellipsometry (SE) was employed to determine the film thickness and optical constants. A two-layer model was used to describe the experimental ellipsometric data. At any wavelength longer than 390 nm, the refractive index decreases gradually with increasing ZnO content in the composite films. The optical band gap increased with increasing ZnO content. The photocatalytic behavior of TiO 2 -ZnO thin films was mainly evaluated by measuring the decomposition of methylene blue. The nanocomposite film with ZnO content of 8 at.% has the best photocatalytic activities.

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