Abstract
The crystallinity of zirconia thin films varied with ultraviolet irradiation conditions during thin film preparation. The crystallite size of ZrO 2 thin film was the largest in the case of UV irradiation using a low-pressure mercury lamp under 100% O 2 gas at room temperature. The crystallinity of the thin films has depended on their residual carbon contents in the films. The electrical properties of the ZrO 2 thin films were greatly improved in the case of UV irradiation using a low-pressure mercury lamp under 100% O 2 gas at room temperature.
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